1402/12/05
تقی محسن پور

تقی محسن پور

مرتبه علمی: دانشیار
ارکید:
تحصیلات: دکترای تخصصی
اسکاپوس:
دانشکده: دانشکده علوم پایه
نشانی:
تلفن: 01135302480

مشخصات پژوهش

عنوان
Optical and electrical properties of N-DLC films deposited by atmospheric pressure DBD plasma: Effect of deposition time
نوع پژوهش
JournalPaper
کلیدواژه‌ها
Atmospheric DBD plasma Bubbling system Optical Electrical and mechanical properties
سال
2020
مجله Surfaces and Interfaces
شناسه DOI
پژوهشگران Taghi Mohsenpour ، farshad Sohbaztadeh Lonbar ، Reza Safari

چکیده

In this study, at atmospheric pressure, a dielectric barrier discharge (DBD) plasma was used to deposit the diamond-like carbon film doped by nitrogen atoms (N-DLC) on a glass substrate. The nitrogen gas was sent to the n-hexane container by bubbling technique and finally, n-hexane/ nitrogen vapor was guided to the plasma gap. The composition and the structure of the deposited films were studied by FTIR and Raman spectra and EDX analysis. The effect of deposition time on optical, electrical, and mechanical properties of coated films was investigated. Changes in N-DLC film characteristics were assigned to the decreased hydrogen participation rate during the growth process and increasing both sp2 cluster size and sp2 content. The surface morphology of films was analyzed by FESEM and AFM assay.