17 بهمن 1401
سعيد ميرزانژاد

سعید میرزانژاد

مرتبه علمی: استاد
نشانی: مازندران-بابلسر-دانشگاه مازندران-دانشکده علوم پایه-گروه فیزیک اتمی و مولکولی-کد پستی 95447-47416
تحصیلات: دکترای تخصصی / فیزیک اتمی و مولکولی (برهمکنش لیزر-پلاسما)
تلفن: 09111126004
دانشکده: دانشکده علوم پایه

مشخصات پژوهش

عنوان Characterization of diamond-like carbon thin film synthesized by RF atmospheric pressure plasma Ar/CH 4 jet
نوع پژوهش مقاله چاپ شده
کلیدواژه‌ها
Atmospheric pressure deposition,Diamond like carbon coating, Thin film, RF plasma jet
مجله SUPERLATTICES AND MICROSTRUCTURES
شناسه DOI https://doi.org/10.1016/j.spmi.2015.11.016
پژوهشگران فرشاد صحبت زاده لنبر (نفر اول) ، رضا صفری (نفر دوم) ، غلامرضا اطاعتی (نفر سوم) ، اسکندر اسدی (نفر چهارم) ، سعید میرزانژاد (نفر پنجم) ، محمد تقی حسین نژاد (نفر ششم به بعد) ، امید صمدی (نفر ششم به بعد) ، هانیه باقری (نفر ششم به بعد)

چکیده

The growth of diamond like carbon (DLC) on a Pyrex glass was investigated by a radio frequency (RF) atmospheric pressure plasma jet (APPJ). The plasma jet with capacitive configuration ran by a radio frequency power supply at 13.56 MHz. Alumina ceramic was used as dielectric barrier. Ar and CH4 were used in atmospheric pressure as carrier and precursor gases, respectively. Diamond like carbon thin films were deposited on Pyrex glass at substrate temperature and applied power of 130 °C and 250 Watts, respectively. Performing field emission scanning electron microscope (FE-SEM) and laser Raman spectroscopy analysis resulted in deposition rate and the ID/IG ratio of 21.31 nm/min and 0.47, respectively. The ID/IG ratio indicated that the coating possesses relative high sp3 content The optical emission spectroscopy (OES) diagnostic was applied to diagnose plasma jet species. Estimating electron temperature and density of the RF-APPJ resulted in 1.36 eV and 2.75 × 1014 cm-3 at the jet exit, respectively.