09 بهمن 1401
تقي محسن پور

تقی محسن پور

مرتبه علمی: دانشیار
نشانی: گروه فیزیک دانشگاه مازندران
تحصیلات: دکترای تخصصی / فیزیک پلاسما
تلفن: 01135302480
دانشکده: دانشکده علوم پایه

مشخصات پژوهش

عنوان Optical and electrical properties of N-DLC films deposited by atmospheric pressure DBD plasma: Effect of deposition time
نوع پژوهش مقاله چاپ شده
کلیدواژه‌ها
Atmospheric DBD plasma Bubbling system Optical Electrical and mechanical properties
مجله Surfaces and Interfaces
شناسه DOI https://doi.org/10.1016/j.surfin.2020.100795
پژوهشگران رضا صفری (نفر اول) ، فرشاد صحبت زاده لنبر (نفر دوم) ، تقی محسن پور (نفر سوم)

چکیده

In this study, at atmospheric pressure, a dielectric barrier discharge (DBD) plasma was used to deposit the diamond-like carbon film doped by nitrogen atoms (N-DLC) on a glass substrate. The nitrogen gas was sent to the n-hexane container by bubbling technique and finally, n-hexane/ nitrogen vapor was guided to the plasma gap. The composition and the structure of the deposited films were studied by FTIR and Raman spectra and EDX analysis. The effect of deposition time on optical, electrical, and mechanical properties of coated films was investigated. Changes in N-DLC film characteristics were assigned to the decreased hydrogen participation rate during the growth process and increasing both sp2 cluster size and sp2 content. The surface morphology of films was analyzed by FESEM and AFM assay.