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Title Electrical and optical properties of ZrxLa1-xO y nanocrystallites as an advanced dielectric for the next FET devices
Type JournalPaper
Keywords FET, ZLO, Gate dielectric
Abstract In the present work, the spatial distribution of the leakage current through ZrxLa1−xOy thin films with different degrees of crystallinity temperatures was investigated. ZrxLa1−xOy nanocrystallites were prepared by sol–gel method, in that Zr atomic fractions in the combined is at the range of x = 5–60 %. The nanocrystallite’s phases and properties were characterized with using X-ray diffraction, fourier transfer infrared radiation, scanning electron microscopy, atomic force microscopy and transmission electron microscopy techniques. Electrical property characterization was also performed with cyclic-voltameter (C-V) technique in TRIS solution (pH = 7.3, with the formula (HOCH2)3CNH2). C-V measurements showed current flow through the TRIS reduces at higher temperatures. Moreover, elemental qualitative analysis was performed with map and energy dispersive X-ray spectra confirmed above claims.
Researchers Reza Gholipur (Second Researcher), Ali Bahari (First Researcher)