1403/01/10
فرشاد صحبت زاده لنبر

فرشاد صحبت زاده لنبر

مرتبه علمی: استاد
ارکید:
تحصیلات: دکترای تخصصی
اسکاپوس:
دانشکده: دانشکده علوم پایه
نشانی:
تلفن: 9125155360

مشخصات پژوهش

عنوان
Characterization of diamond-like carbon thin film synthesized by RF atmospheric pressure plasma Ar/CH 4 jet
نوع پژوهش
JournalPaper
کلیدواژه‌ها
Atmospheric pressure deposition,Diamond like carbon coating, Thin film, RF plasma jet
سال
2016
مجله SUPERLATTICES AND MICROSTRUCTURES
شناسه DOI
پژوهشگران farshad Sohbaztadeh Lonbar ، Reza Safari ، gholamreza etaati ، eskandar asadi ، Saeed Mirzanejhad ، mohammad taghi Hosseinnejad ، omid samadi ، hanieh bagheri

چکیده

The growth of diamond like carbon (DLC) on a Pyrex glass was investigated by a radio frequency (RF) atmospheric pressure plasma jet (APPJ). The plasma jet with capacitive configuration ran by a radio frequency power supply at 13.56 MHz. Alumina ceramic was used as dielectric barrier. Ar and CH4 were used in atmospheric pressure as carrier and precursor gases, respectively. Diamond like carbon thin films were deposited on Pyrex glass at substrate temperature and applied power of 130 °C and 250 Watts, respectively. Performing field emission scanning electron microscope (FE-SEM) and laser Raman spectroscopy analysis resulted in deposition rate and the ID/IG ratio of 21.31 nm/min and 0.47, respectively. The ID/IG ratio indicated that the coating possesses relative high sp3 content The optical emission spectroscopy (OES) diagnostic was applied to diagnose plasma jet species. Estimating electron temperature and density of the RF-APPJ resulted in 1.36 eV and 2.75 × 1014 cm-3 at the jet exit, respectively.