Tungsten oxide electrochromic (EC) thin films are prepared by physical vapor deposition (PVD) method in vacuum on fluorine doped tin oxide (FTO) coated glass substrate. In order to provide different surface morphology, the FTO-coated glass substrates are used in two deferent modes. The first sample is deposited at an angle of 0° and the second sample deposited at an angle of 75°. In this method, WO3 nanoparticles powder with the same rate are deposited in vacuum. The Ag nanoparticles powder is utilized to decorate the surface of each of WO3 thin films by using PVD method. The EC thin films are annelid to inject the Ag nanoparticles into the surface of thin films. The band gap of WO3–Ag thin films are reported for indirect transitions. EC properties of WO3–Ag thin films are investigated by cyclic voltammetry and the visible transmittance to compare the influence of surface morphology of WO3–Ag thin films on EC performance. In particular, a significant optical modulation (40.59% at 632.8 nm) and high coloration efficiency (90.2 cm2 C−1 at 632.8 nm) are enhanced for the second sample compared to the first sample.
