The performance of multilayers has been widely investigated in metal/metal systems. Shrinking this system down to less than 10 nm dislocation blocking occurs. We should thus try to find a way to get a structure with less dislocation, and/or strain because low diffusivity ultra high vacuum chamber is the basic requirements for growing ultra thin films and nano scale materials. We used William–Hall relation based on Scherr equation in X-ray powder spectrum and drawn the stress– strain diagrams. It shows that Al–Fe–Cr–Ti composites have very low diffusivity and equilibrium solubility in Al (0.05 at.% Fe, >0.02 at.% Cr, and >0.3 at.% Ti). Al–Ti– Fe–Cr composite powders have also been prepared from sol–gel method starting from elemental powders at both ambient and elevated temperatures. The obtained results from XRD (X-ray Diffraction), AFM (Atomic Force Microscopy) and X-ray powder techniques indicate that nano-grains with 0.03 at %Cr can cause a reduction of leakage current through the SS chamber due to its amorphous structure.
