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Ali Bahari

Ali Bahari

Academic rank: Professor
ORCID:
Education: PhD.
ScopusId:
HIndex:
Faculty: Science
Address:
Phone: 9112537702

Research

Title
Sol–Gel Processing and Characterization of Z-DL (Zirconium-Doped Lanthanum) Nanocrystallites for Substrate Coating
Type
JournalPaper
Keywords
high-k dielectric, nanotransistor, sol-gel method, zirconium-doped lanthanum oxide
Year
2013
Journal International Journal of Green Nanotechnology
DOI
Researchers Ali Bahari ، Reza Gholipur

Abstract

As the dimensions of the MOSFETs gate dielectric are scaled down to 1 nm, resulting in high gate leakage currents due to the quantum tunneling effect, ZrxLa1-xOy can be introduced as a candidate. In the present work, ZrxLa1-xOy nanocrystallites were prepared by sol-gel method. Sol-gel solutions of ZrxLa1-xOy with Zr atomic fractions of x = 5%, 20%, and 50% were synthesized for film deposition. The nanocrystallites were characterized using X-Ray Diffraction (XRD) and Scanning ElectronMicroscopy (SEM) techniques. The obtained results reveal that ZrxLa1-xOy gate dielectric can be introduced as a suitable gate dielectric for the future of nanotransistor generations due to its high-k dielectric, reduction of leakage current, as well as a tunneling current and an amorphous structure.