1403/02/05
حبیب حمیدی نژاد

حبیب حمیدی نژاد

مرتبه علمی: دانشیار
ارکید:
تحصیلات: دکترای تخصصی
اسکاپوس:
دانشکده: دانشکده علوم پایه
نشانی:
تلفن: 0113530....

مشخصات پژوهش

عنوان
Vertically-tapered silicon nanowire arrays prepared by plasma enhanced chemical vapor deposition: Synthesis, structural characterization and photoluminescence
نوع پژوهش
JournalPaper
کلیدواژه‌ها
Crystal structure Taperingparameter Temperature Vapor–liquid–solid
سال
2014
مجله MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
شناسه DOI
پژوهشگران Habib Hamidinezhad ، Ali Akbar Ashkarran ، Zulkurnain Abdul-Malek

چکیده

Vertically aligned silicon nanowires (SiNWs) have been successfully synthesized using pure silane gas as a precursor by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of the growth temperature on the morphology, structure and photoluminescence properties of SiNWs has been studied. The SiNWs were needle-liked materials with the length of a few microns having the diameters of tens of nanometers near the bottom and a few nanometers at the top. Thinner nanowires have been obtained at the higher growth temperature process. High resolution transmission electron microscopy confirms that the nanowires are composed of a crystalline silicon core with an oxide shell. The PL spectrum of the Si nanoneedles have shown two emission bands around 450 nm and ~750, which originate from the defects related to oxygen fault in the oxide shell and interfaces between the crystalline Si core and the oxide shell, respectively.