In the present work, the spatial distribution of the leakage current through ZrxLa1−xOy thin films with different degrees of crystallinity temperatures was investigated. ZrxLa1−xOy nanocrystallites were prepared by sol–gel method, in that Zr atomic fractions in the combined is at the range of x = 5–60 %. The nanocrystallite’s phases and properties were characterized with using X-ray diffraction, fourier transfer infrared radiation, scanning electron microscopy, atomic force microscopy and transmission electron microscopy techniques. Electrical property characterization was also performed with cyclic-voltameter (C-V) technique in TRIS solution (pH = 7.3, with the formula (HOCH2)3CNH2). C-V measurements showed current flow through the TRIS reduces at higher temperatures. Moreover, elemental qualitative analysis was performed with map and energy dispersive X-ray spectra confirmed above claims.
